Air pressure type active anti-vibration unit.
The best masterpiece made with Showa Science’s excellent anti-vibration technology. Standard series having many variation Easy to use with high level balance.
High sensitive acceleration sensors are exclusively attached for VAAV. They can correctly pick up very small vibration.
VAAV quickly calculates with high speed anti-vibration algorithm and can cancel the vibration in an instance with high power precision actuators.
High sensitive sensors are also used for floor side, and high level anti-vibration performance is achieved with feed-forward control.
Vibration caused by loaded stage can be attenuated in short period, having resonance-less high speed and high precision anti-vibration performance.
Stage feed forward function and Wave form display software is loaded.
- Realized a very wide frequency range vibration transmission characteristic without resonance.
- Steady anti-vibration characteristic and high precision position control with 6 degrees of freedom.
- It can select high speed response with high power valves for big load movements.
- The controller SAC-07 has been reliably designed and has CE mark for safety.
- A stage feed forward function & vibration waveform display analysis software are loaded for standard type.
- In the field of semiconductor production, these products are used for the steps of anti-vibration and inspections for minute processing and moving stages.
- In the liquid crystal production and inspection process, these products are conveniently used, because of their quick attenuation of the vibration caused by auto-loader or stage movements.
- In the field of precision mechanical processing, these products are used to remove vibration caused by big load movements during the process.
| Type | Load range | Dimension(mm) |
|---|---|---|
| VAAV-550A | 270～900kg | 215(W)×160(D)×170(H)mm |
| VAAV-1000A | 500～1700kg | 225(W)×210(D)×170(H)mm |
| VAAV-2200A | 1100～3700kg | 280(W)×240(D)×208(H)mm |
| VAAV-4000A | 2100～7000kg | 330(W)×270(D)×208(H)mm |
| VAAV-10000A | 5000～17000kg | 465(W)×400(D)×240(H)mm |
| VAAV-20000A | 11400～38000kg | 600(W)×600(D)×284(H)mm |
| VAAV-30000A | 15000～50000kg | 700(W)×700(D)×182(H)mm |
| HA-450 Vertical Actuator | 480(W)×365(D)×405(H)mm | |
- * Standard configuration is 4 units per stand.
- * HA‒450 is a vertical actuator for VAAV-30000A.
- * The values mentioned in the load range of the above table is one when the load is static and equal.
| Controller SAC-07 |
300(W)×300(D)×118(H)mm |
|---|---|
| Power supply | AC100V〜240V 100VA(Single phase) |
| Cable for power supply | 3m |
| Regulator unit RGU-07 |
250(W)×100(D)×200(H)mm |
| Cable for regulator unit | 5m |
| The degree of freedom | 3 axes 6 freedom |
|---|---|
| Transmissibility |  |
| Position accuracy | ±10μm |
| Primary air pressure | More than 0.6 MPa (Clean air) |
| Air consumption | Normal valve 60 L/min High speed response valve 250 L/min |
