Surface plate type vibration isolation table servo-system OR series

Exclusively developed passive vibration isolation unit, using the most advanced anti-vibration technology.
The advanced abilities of optical experiments and equipment will be fully drawn out.
These types are recommended for performance taking customers necessary to use highest products.

Line-upped six kinds of Showa Science’s surface plate type anti-vibration table (vibration isolation table) are prepared for your budget and usage.

These tables can keep the level automatically, adjusting the air pressure with a small compressor only.

You can concentrate your efforts to your investigation and measurements without levelling the table.We are preparing air shieling types or maintenance free types for customers who need not air source.

You can easily select the most suitable type according to the load and size checking with your budget.

The latest anti-vibration techniques such as swing arm, viscosity damper, and pendulum structure are used in these types.

The original know-how of Showa Science, who has rich results in the field of anti-vibration, is fully involved in these types.

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Merits

  • Auto levelling function (horizon auto-maintaining) and high attenuation function are generally attached.*Except ORC and ORR types.
  • Showa Science’s surface plate type vibration isolation table has the highest level of vibration isolation and attenuation performance. Just after its setting, you are free from complicated troubles caused from vibration. Customers are not stressed with such troubles.
  • With the lowest natural frequency in the anti-vibration business fields, these types are effective on almost vibration troubles.
  • We prepare four types according to the accuracy of equipment and alignment. High attenuation steel core SHD, high stiffness light weight steel core SH and high accuracy type surface plate: stone surface plate SG, cast iron SG (surface accuracy JIS00 to 1st class).
  • Tapping pitch can be selected: M6‒25mm，50mm，100mm. Other types of special processing are possible.
  • A table tap (100 V/1500 W) is generally attached.*For all types.

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Product usage

  • Optical experiments / Roughness gauges / Shape measuring instruments / Interferometers / AFM / STM / SPM / Various kinds of Stages

Product line-up

OSD High performance air supply type (highest performance type)

OSD High performance air supply type (highest performance type)
Air supply typeHaving auto levelling function
Natural frequency：
Vertical. about 1.0 Hz, Horizontal. about 0.5 Hz

This is the highest type among OR series. Swing arm structure and all direction damper are mounted.

Swing arm structure are the system applicating the principle of pendulum and the flexural rigidity of arm. Still higher performance is realized, adding to the swing arm structure with exclusive developed air spring.

OSD High performance air supply type (highest performance type)An all directions damper attenuates a wide range of frequency.

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ORP High performance general use type

ORP High performance general use type
Air supply typeHaving auto levelling function
Natural frequency：
Vertical. about 2.0 Hz, Horizontal. about 1.4 Hz

Higher model within the servo systems. Exclusively developed pendulums are mounted. Excellent vibration performance is realized, reducing the rotation vibration of the load which has high weight center.

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ORD Air supply type (general use)

ORD Air supply type (general use)
Air supply typeHaving auto levelling function
Natural frequency：
Vertical. about 2.0 Hz, Horzontal. About 1.4 Hz

This table is the entry model of servo system.
This servo system has all round type performance of anti-vibration characteristic approaching OSD type.
This type has a steady vibration isolation performance with the viscous damper, exclusively developed for this table.

ORD Air supply type (general use)The viscous damper which reduces the resonance magnification is mounted.
Efficient work will be obtained.

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ORE Air supply type (low cost general use type)

ORE Air supply type (low cost general use type)
Air supply typeHaving auto levelling function
Natural frequency：
Vertical. about 1.5 Hz, Horizontal. about 1.8 Hz

This type is an economy type of servo system.
ORE type is a low cost servo system.
A variable orifice is normally mounted and can adjust the damping.

ORE Air supply type (low cost general use type)A variable orifice which controls the air pressure to suitable one for damping is mounted.

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ORC Air shieling type (low cost general use)

ORC Air shieling type (low cost general use)
Air shield typeHand level adjust
Natural frequency：
Vertical. about 4.5 Hz, Horizontal. about 3.8 Hz

The air springs which do not need air supply are mounted on this type of table.
Air supply about once a month is necessary.
A high pressure hand pump is normally attached.

ORC Air shieling type (low cost general use)High performance air shielding springs are adopted.

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ORR High damping type (Low cost simple type)

ORR High damping type (Low cost simple type)
High attenuation adjuster type
Natural frequency：
Vertical. about 9.0 Hz, Horizontal. about 3.8 Hz

Exclusively developed higher attenuation rubber is adopted for this type.
This type is a low and simple one, having excellent workability.
Simple anti-vibration table, easy to move and set.

ORR High damping type (Low cost simple type)For this type, exclusively developed higher anti-vibration attenuation rubber is adopted.

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