Bellows type air spring：AT series

These are the high performance air springs which can be used for a high speed stage.

  • Bellows type air spring：AT series
  • This shows air spring is attached to a frame.
    This shows air spring is attached to a frame.

Bellows type air spring named “AT Series”

Five kinds are prepared. An extraordinarily large equipment having more than 500 tons weight can be loaded with these kinds of air spring combination.

These are compact air springs, having good vibration attenuation structure and over-float prevention function inside. These also have excellent anti-vibration characteristics both on horizontal and vertical direction.

They are used with auto-level adjusters, so the board level maintains constant, even if the load weight changes, or stage move on the board.

Durable special rubber is used for these air springs, and a high-speed stage can be loaded on the board.

We are ready for your plan, according to the apparatuses to be loaded.

AT series vibration transmissibilityAT series vibration transmissibility

Merits

  • This series have a most excellent anti-vibration performances in the field of large scale passive units.
  • This series have good vibration damping structure and over-float prevention function inside. They are compact air springs, having a high damping performance which cannot be obtained with ordinary air springs.
  • With aids of level adjusters, this system can response to the stage movement, or change of the work. The board level (working level) is constantly kept horizontally with automatic level adjusters.
  • Durable special rubber is adopted and this system can response to the stage movement.
  • We can supply anti-vibration frames attached with AT series air spring. We propose the systems most suitable to your plan.

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Product usage

  • Semi-conductor inspection machine/ Electron microscope (SEM, TEM) / LCD inspection equipment/ LCD repair equipment / Super-precision manufacturing equipment

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