*Click a "◯" within the table to jump to the details page.
| ▼ Active | ▼ Passive | ▼ Air spring unit | ||||||
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| Mocroscope |  CD |
 ST-X |
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| Electronic balance | SD |
BB-S1 |
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| Rougeness tester Shape measuring instrument |
ORP |
CD |
PB-5AA |
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| Film thickness measuring instrument | OSD |
ND |
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| Interferometer (AFM,STM,SPM) |
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OSD |
ND |
PB-5AA |
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| Optical experiment | |
OSD |
CDH |
PHB-A |
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| Various stages | |
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| Circularity measuring instrument | CD |
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| Electronic microscope (SEM,TEM) |
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| Aligner,EB stepper | |
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| Prober | CD |
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| Semiconductor inspection equipment | |
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CD |
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| LCD inspection equipment | |
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| CMM | |
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| Ultra precision processing machine | |
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| Very large equipment | |
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| ▲ Acrtive | ▲ Passive | ▲ Air spring unit | ||||||
