Vibration isolation table

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  ▼ Active ▼ Passive ▼ Air spring unit
  VAAV-A Standard Type VAAV-H Slim Type VAAV-E linear motor type Surface plate type vibration isolation Desk type anti-vibration table Board type vibration isolator Bellows type air spring:AT series High performance air spring unit: AMP series
Mocroscope         CD ST-X    
Electronic balance         SD BB-S1    
Rougeness tester
Shape measuring instrument
      ORP CD PB-5AA    
Film thickness measuring instrument       OSD ND      
Interferometer
(AFM,STM,SPM)
    OSD ND PB-5AA  
Optical experiment     OSD CDH PHB-A  
Various stages              
Circularity measuring instrument         CD    
Electronic microscope
(SEM,TEM)
         
Aligner,EB stepper          
Prober         CD    
Semiconductor inspection equipment     CD    
LCD inspection equipment          
CMM          
Ultra precision processing machine          
Very large equipment          
  VAAV-A Standard Type VAAV-H Slim Type VAAV-E linear motor type Surface plate type vibration isolation Desk type anti-vibration table Board type vibration isolator Bellows type air spring:AT series High performance air spring unit: AMP series
  ▲ Acrtive ▲ Passive ▲ Air spring unit

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